Introducing the GFC X and Flow Ratio Controller, setting new benchmarks in semiconductor manufacturing efficiency and precision.
Fremont, California — August 30, 2024 — Pivotal Systems Corporation, a leading provider of innovative gas flow control (GFC) solutions to the semiconductor industry, is set to unveil two innovative products — the GFC X and the Flow Ratio Controller (FRC) — at the upcoming SEMICON Taiwan 2024, September 4-6. These new products represent a significant step forward in semiconductor manufacturing, offering unmatched precision, speed, and reliability.
The GFC X, the latest generation in Pivotal’s high-flow product line, features a pressure-based flow controller with a position control valve. This innovation allows for precise control, offering one of the industry’s widest ranges of accuracy, making it ideal for various applications, including deposition processes.
The GFC X paves the way for the future of gas flow control by offering an order of magnitude improvement on key flow metrics and enabling advanced wafer-manufacturing processes. In addition, the GFC X offers a range of accuracy from 5% to 100% of full scale, surpassing many competitors.
“Our customers can rely on precise accuracy without the need for frequent calibrations,” said Joseph Monkowski, President and CTO of Pivotal Systems. “These innovations significantly boost fab productivity and capital efficiency, leveraging our cutting-edge solutions.”
The FRC, first introduced during Semicon West in July, is designed to meet the industry’s growing demand for faster and more responsive flow control. The FRC uses Pivotal’s proprietary control valve to improve wafer uniformity and wafer-to-wafer uniformity. It’s the industry’s fastest flow ratio controller, with a sub-second response time, enabling rapid adjustments to changing conditions, particularly in high-bandwidth memory and AI applications.
Both products exemplify Pivotal’s commitment to delivering superior performance, featuring zero drift, best-in-class accuracy, and real-time data availability. Pivotal’s competitive advantage lies in its drift-free performance, offering ±0.5% of set point and repeatability of ±0.2% of set point.
Designed to minimize downtime and reduce the need for recalibration, the GFC X and FRC provide consistent, reliable results, significantly lowering the total cost of ownership for semiconductor manufacturers.
Pivotal’s products are already making waves among major industry players, who appreciate the unparalleled reliability and accuracy these solutions offer. While Pivotal cannot disclose customer names, the benefits of the GFC X and FRC are resonating strongly with the market.
“Pivotal Systems has a long history of innovation in semiconductor manufacturing, consistently pushing the boundaries of what’s possible in flow control technology,” said Jan-Yu Weng, CEO of Pivotal Systems. “The launch of the GFC X and FRC at Semiconductor Taiwan is a testament to the company’s ongoing commitment to excellence.”
Visit Pivotal Systems at Booth J3034 at SEMICON Taiwan 2024 to see the GFC X and FRC and learn more about how these groundbreaking products can enhance your semiconductor manufacturing processes.
About Pivotal Systems
Pivotal Systems provides the best-in-class gas flow monitoring and control technology platform for the global semiconductor industry, as well as other industries requiring high performance, high reliability gas flow solutions. The Company’s proprietary hardware and software utilizes advanced machine learning to enable preventative diagnostic capability resulting in significant increases in productivity and capital efficiency. For more information on Pivotal Systems Corp, visit www.pivotalsys.com.
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Michelle Adelson
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