The industry's best flow accuracy for the entire flow range.
Fastest flow time: <100ms.
Self-calibrating: drift-free and no maintenance required.
Gas Flow Controller

GFC S

GFC S5™ | GFC S20™ | GFC S200™ | GFC S1K™ | GFC S2K™

Pivotal Systems’ GFC paves the way for the future of gas flow control. The GFC combines Pivotal’s patented, high accuracy GFM system with patented control valve technology. As such, it leapfrogs the current MFC technology by offering an order of magnitude improvement on key flow metrics, thereby enabling advanced wafer-manufacturing processes. At Pivotal Systems, we aim to significantly enhance fab productivity and capital efficiency by utilizing our innovative solutions.

Features

  • Flow accuracy +/- 0.5% of Setpoint
  • Response time <50ms
  • Machine Learning used to update valve positioning
  • Open flow path with no small orifices or capillary tubes

Benefits

  • No zero drift
  • Calibration and maintenance free
  • Exceptional corrosive gas performance
  • Unparalleled diagnostics available

Specifications

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The Future of Flow Control is Now.