GFC T

A lower cost solution, servicing broader applications and markets. Pivotal Systems’ GFC paves the way for the future of gas flow control. The GFC combines Pivotal’s patented, high accuracy GFM system with patented control valve technology. As such, it leapfrogs the current MFC technology by offering an order of magnitude improvement on key flow metrics, thereby enabling advanced wafer-manufacturing processes. At Pivotal Systems, we aim to significantly enhance fab productivity and capital efficiency by utilizing our innovative solutions.

Specifications